MKS Instruments Type 649
15-pin Type "D"
|
Pin
|
Description
|
| 1 |
Valve Test Point |
| 2 |
Pressure Signal |
| 3 |
Valve Close (low) |
| 4 |
Valve Open (low) |
| 5 |
Power Common |
| 6 |
-15 VDC Supply |
| 7 |
+15 VDC Supply |
| 8 |
Set Point Input |
| 9 |
Flow Output |
| 10 |
Optional Input |
| 11 |
Signal Common |
| 12 |
Signal Common |
| 13 |
Trip Point A Out |
| 14 |
Trip Point B Out |
| 15 |
Chassis Gnd. |
Download a PDF version of this file.
Note:
This information is subject to change without notice.
Need help?
Contact MKS Instruments by sending an email to MKS or call 800-227-8766 or 978-284-4000 (outside the USA).