Residual Gas Analysis: Understanding and Using the Partial Pressure Transducer

"Understanding and Using the Partial Pressure Transducer" provides a technical overview of the quadrupole mass spectrometer residual gas analyzer (RGA), the operating principle of the RGA, sampling systems and the basics of spectrum analysis. Several examples of process monitoring and leak detection fundamentals are discussed. Lecture topics include:

Uses of the RGA
Principles of mass separation
Construction of the quadrupole partial pressure transducer
Comparison of open & closed ion sources
Performance measures
Inlet sampling systems
Spectrum analysis fundamentals and aids for interpretation
The RGA as a process monitor
Display modes: analog, bar chart, pressure vs time, libraries, background subtraction
Leak detection with the RGA

Participants will be exposed to a variety of exercises using the RGA, reinforcing the concepts learned during the course.